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Development of textured ZnO-coated low-cost glass substrate with very high haze ratio for silicon-based thin film solar cells
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Document Title
Development of textured ZnO-coated low-cost glass substrate with very high haze ratio for silicon-based thin film solar cells
Author
Hongsingthong A, Krajangsang T, Limmanee A, Sriprapha K, Sritharathikhun J, Konagai M
Name from Authors Collection
Affiliations
National Science & Technology Development Agency - Thailand; National Electronics & Computer Technology Center (NECTEC); Tokyo Institute of Technology
Type
Article
Source Title
THIN SOLID FILMS
ISSN
0040-6090
Year
2013
Volume
537
Issue
2-3
Open Access
hybrid
Publisher
ELSEVIER SCIENCE SA
DOI
10.1016/j.tsf.2013.04.138
Format
Abstract
Zinc oxide (ZnO) films with a very high haze ratio and low resistivity were developed on soda-lime glass substrate by using reactive ion etching (RIE) treatment with carbon tetrafluoride (CF4) to modify the substrate surface morphology before the deposition of ZnO films. We found that the surface morphology of the ZnO films deposited by metal organic chemical vapor deposition (MOCVD) technique could be modified by varying the glass treatment conditions and the gas pressure was a key parameter. With increasing glass-etching pressure, the surface morphology of the ZnO films changed from conventional pyramid-like single texture to greater cauliflower-like double texture, leading to significant increases in root mean square roughness and haze ratio of the films. By employing the developed high-haze ZnO films as a front transparent conductive oxide (TCO) layer in microcrystalline silicon solar cells, an enhancement in the quantum efficiency in the long-wavelength region has been achieved. Experimental results have verified that our unique and original glass etching treatment is a simple and effective technique to improve the light-scattering properties of the ZnO films while preserving their good transparency and electrical properties. Thus, the ZnO films deposited on etched soda-lime glass have a high potential for the use as a front TCO layer in thin-film Si solar cells. (C) 2013 The Authors. Published by Elsevier B.V. All rights reserved.
Keyword
Etching | Glass | Haze | Thin-film solar cell | Transparent conducting oxides | Zinc oxide
Funding Sponsor
National Electronics and Computer Technology Center (NECTEC), Thailand [P-11-30006]
License
CC BY-NC-SA
Rights
Authors
Publication Source
WOS