Fabrication and Characterization of Ag朤a Thin Films by Co-Magnetron Sputtering as Alternative Layer for High Reflection of NIR Radiation

Abstract

Silver杢antalum (Ag朤a) thin films were fabricated by magnetron co-sputtering on silicon (Si) wafer (100) and glass slide substrates at room temperature. The Ag朤a thin films were prepared at various deposition times of 5 10 20 and 30 s and the physical structural and optical properties of the Ag朤a thin films were investigated. It was determined that the thicknesses of the films were 7 9 17 and 33 nm respectively. The results revealed that an increase in the film thickness leads to a monotonic increase in FCC and BCC phase of Ag and Ta respectively. The work function and stoichiometric of the Ag朤a thin films were investigated by ultraviolet and X-ray photoemission spectroscopies (UPS and XPS) respectively. The potential of Ag朤a thin films to be used as low-emission coating was investigated using a spectrophotometer. A UV朧IS朜IR spectrophotometer was used to measure the spectral reflectance in the wavelength range from 300 to 2000 nm. The results showed that the Ag朤a thin film deposited for 30 s exhibited higher reflectance in NIR region than those of 5 10 20 and 30 s. It demonstrated an average reflectance of about 80% and slightly decreased to 75% after being kept in the air atmosphere for 28 days. It can be likewise proposed as an alternative thin film with high reflectance of NIR radiation single layer to develop industrial low-emission coating for cost-effective clean and easy adaptation to a large area coating. ? 2022 by the authors.