-
Fabrication and Characterization of Hydrophilic TiO2 Thin Films on Unheated Substrates Prepared by Pulsed DC Reactive Magnetron Sputtering
- Back
Document Title
Fabrication and Characterization of Hydrophilic TiO2 Thin Films on Unheated Substrates Prepared by Pulsed DC Reactive Magnetron Sputtering
Author
Horprathum M, Chindaudom P, Limnonthakul P, Eiamchai P, Nuntawong N, Patthanasettakul V, Pokaipisit A, Limsuwan P
Name from Authors Collection
Affiliations
National Science & Technology Development Agency - Thailand; National Electronics & Computer Technology Center (NECTEC); Srinakharinwirot University; King Mongkuts University of Technology Thonburi
Type
Article
Source Title
JOURNAL OF NANOMATERIALS
ISSN
1687-4110
Year
2010
Volume
2010
Page
-
Open Access
Green Submitted, gold
Publisher
HINDAWI LTD
DOI
10.1155/2010/841659
Format
Abstract
TiO2 thin films were deposited on unheated silicon wafers (100) and glass slides by a pulsed DC reactive magnetron sputtering in an ultrahigh vacuum (UHV) system. The effects of both an operating pressure and deposition time on film structure, surface morphology, and optical property were studied. The film structure and microstructure were characterized by grazing-incidence X-ray diffraction (GIXRD) technique and transmission electron microscopy (TEM). The surface morphology was investigated by field emission scanning electron microscopy (FE-SEM). The optical property of the TiO2 thin films was determined by spectroscopic ellipsometry (SE). The water contact angle measurement was also used to determine hydrophilicity of the films after exposed to UV light. The results suggested that the TiO2 thin film at less than 40 nm was amorphous. As the thickness was increased, the mixture of anatase and rutile phases of TiO2 began to form. By reducing the operating pressure during the film deposition, the rutile phase component can also be enhanced. Both the increased film thickness and decrease operating pressure were the critical factors to improve the hydrophilicity of the TiO2 thin films.
Industrial Classification
Knowledge Taxonomy Level 1
Knowledge Taxonomy Level 2
Funding Sponsor
National Electronics and Computer Technology Center (NECTEC); Faculty of Science, King Mongkut's University of Technology Thonburi; National Research University
License
CC BY
Rights
Authors
Publication Source
WOS