Home > Collections > NSTDA's Research Publications > Fabrication of an acetone gas sensor based on Si-doped WO3 nanorods prepared by reactive magnetron co-sputtering with OAD technique
Suranaree University of Technology; National Science & Technology Development Agency - Thailand; National Electronics & Computer Technology Center (NECTEC); Suranaree University of Technology
Type
Article
Source Title
MATERIALS RESEARCH EXPRESS
Year
2021
Volume
8
Issue
12
Page
-
Open Access
gold
Publisher
IOP Publishing Ltd
DOI
10.1088/2053-1591/ac44d5
Format
PDF
Abstract
Gas sensing technology is currently applied in a variety of applications. In medical applications, gas sensors can be used for the detection of the biomarker in various diseases, metabolic disorders, diabetes mellitus, asthma, renal, liver diseases, and lung cancer. In this study, we present acetone sensing characteristics of Si-doped WO3 nanorods prepared by a DC reactive magnetron co-sputtering with an oblique-angle deposition (OAD) technique. The composition of Si-doped in WO3 has been studied by varying the electrical input power applied to the Si sputtered target. The nanorods film was constructed at the glancing angle of 85 degrees. After deposition, the films were annealed at 400 degrees C for 4 h in the air. The microstructures and phases of the materials were characterized by x-ray photoelectron spectroscopy (XPS), x-ray diffraction (XRD), and field-emission scanning electron microscopy (FESEM). The results showed that 1.43 wt% Si-doped WO3 thin film exhibited the maximum response of 5.92 towards 100 ppm of acetone at performing temperature (350 degrees C), purifying dry air carrier. The process exposed in this work demonstrated the potential of high sensitivity acetone gas sensor at low concentration and may be used as an effective tool for diabetes non-invasive monitoring.