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Mechanical Diaphragm Structure Design of a MEMS-Based Piezoresistive Pressure Sensor for Sensitivity and Linearity Enhancement
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Document Title
Mechanical Diaphragm Structure Design of a MEMS-Based Piezoresistive Pressure Sensor for Sensitivity and Linearity Enhancement
Author
Thawornsathit P, Juntasaro E, Rattanasonti H, Pengpad P, Saejok K, Leepattarapongpan C, Chaowicharat E, Jearnsaksiri W
Name from Authors Collection
Scopus Author ID
35293481600
Affiliations
King Mongkuts University of Technology North Bangkok; National Science & Technology Development Agency - Thailand; National Electronics & Computer Technology Center (NECTEC)
Type
Article
Source Title
ENGINEERING JOURNAL-THAILAND
ISSN
0125-8281
Year
2022
Volume
26
Issue
9
Open Access
gold, Green Published
Publisher
CHULALONGKORN UNIV, FAC ENGINEERING
DOI
10.4186/ej.2022.26.5.43
Format
Abstract
An improved design of the micro-electromechanical system (MEMS) piezoresistive pressure sensor with a combination of a petal edge, a beam, a peninsula, three cross beams and a center boss is proposed in this work for an operating range of low pressure in order to improve the sensor performance, i.e. the sensitivity and the linearity. The finite element method (FEM) is utilized to predict the stress and the deflection of the MEMS piezoresistive pressure sensor under the applied pressure of 1-5 kPa. The functional forms of the longitudinal stress, the transverse stress and the deflection are formulated by using the power law and then are used to optimize the geometry of the proposed design. The simulation results show that the proposed design is able to produce the high sensitivity up to 34 mV/kPa with the low nonlinearity of 0.11% full-scale span (FSS). The nonlinearity error is lowered by the proposed design of the peninsula, three cross beams and the center boss. The sensitivity is enhanced by increasing the petal edge width. The sensor performance of the proposed design is also compared to that of the previous design in the literature. The comparison reveals that the proposed design can perform better than the previous one.
Keyword
finite element method | linearity | MEMS | piezoresistive pressure sensor | sensitivity
Funding Sponsor
Thailand Graduate Institute of Science and Technology (TGIST) scholarship of National Science and Technology Development Agency (NSTDA); Sirindhorn International Thai-German Graduate School of Engineering (TGGS), King Mongkut's University of Technology North Bangkok (KMUTNB)
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