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Preparation and Characterization of Low-emissivity AlN/Ag/AlN Films by Magnetron Co-sputtering Method
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Document Title
Preparation and Characterization of Low-emissivity AlN/Ag/AlN Films by Magnetron Co-sputtering Method
Author
Phae-Ngam W. Kamoldilok S. Rattana T. Lertvanithphol T. Mungchamnankit A.
Affiliations
Physics Program Faculty of Science and Technology Phranakhon Rajabhat University Bangkok 10220 Thailand; Department of Physics Faculty of Science King Mongkut抯 Institute of Technology Ladkrabang Bangkok 10520 Thailand; Department of Physics Faculty of Science Burapha University Chonburi20130 Thailand; Opto-Electrochemical Sensing Research Team National Electronics and Computer Technology Center Pathum Thani12120 Thailand; Department of Physics Faculty of Science Rangsit University Pathum Thani12000 Thailand
Type
Article
Source Title
Journal of Current Science and Technology
ISSN
26300583
Year
2023
Volume
13
Issue
3
Page
533-541
Open Access
All Open Access Hybrid Gold
Publisher
Rangsit University
DOI
10.59796/jcst.V13N3.2023.498
Abstract
AlN and Ag thin films were deposited independently on the Si(100) wafers and glass slides by sputtering technique at various times to find the optimum deposition times for coating AlN and Ag films layers. The results obtained from glazing-incident X-ray diffraction (GIXRD) field-emission scanning electron microscopy (FE-SEM) and transmittance measurements showed that the optimum deposition time for coating AlN and Ag film layers were 40 min and 15 s corresponding to the film thickness of 46.7 and 19.6 nm respectively. The optimum deposition times were used for coating AlN and Ag films in the multilayer AlN/Ag/AlN film stack. Then the multilayer AlN/Ag/AlN film stack was deposited on the glass slide for transmittance measurement and a test glass plate with a size of 10 cm x 10 cm for infrared protection testing. The average solar transmittances in the visible range (? = 380-780 nm) and in the near infrared range (? = 780-2 000 nm) were found to be 48.05 and 15.17% respectively which are comparable with those of a commercial glass. ? 2018-2023 Rangsit University.
License
CC BY-NC-ND
Rights
Journal of Current Science and Technology
Publication Source
WOS